Information system for decision support in the design o

Content: Корпачев М.Ю. Информационная система поддержки принятия решений при проектировании процесса ультрафи (6.47 MB)
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Korpachev, M.Yu. "Information system for decision support in the design of an ultraviolet lithography process" (PDF).
Dissertation for the degree of Candidate of Technical Sciences: 05.13.12 - Design Automation Systems (Instrumentation). Moscow Technological University (MIREA). Moscow, 2016. 205 p.

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